TRACE COPPER MEASUREMENTS AND ELECTRICAL EFFECTS IN LPE HGCDTE

Citation
Jp. Tower et al., TRACE COPPER MEASUREMENTS AND ELECTRICAL EFFECTS IN LPE HGCDTE, Journal of electronic materials, 25(8), 1996, pp. 1183-1187
Citations number
13
Categorie Soggetti
Engineering, Eletrical & Electronic","Material Science
ISSN journal
03615235
Volume
25
Issue
8
Year of publication
1996
Pages
1183 - 1187
Database
ISI
SICI code
0361-5235(1996)25:8<1183:TCMAEE>2.0.ZU;2-I
Abstract
Recent improvements in sputter initiated resonance ionization spectros copy (SIRIS) have now made it possible to measure copper in HgCdTe fil ms into the low 10(13) cm(-3) range. We have used this technique to sh ow that copper is responsible for type conversion in n-type HgCdTe fil ms. Good n-type LPE films were found to have less than 1 x 10(14) cm(- 3) copper, while converted p-type samples were found to have copper co ncentrations approximately equal to the hole concentrations. Some comp ensated n-type samples with low mobilities have copper concentrations too low to account for the amount of compensation and the presence of a deep acceptor level is suggested. Tn order to study diffusion of cop per from substrates into LPE layers, a CdTe boule was grown intentiona lly spiked with copper at approximately 3 x 10(16) cm(-3). Annealing H gCdTe films at 360 degrees C was found to greatly increase the amount of copper that diffuses out of the substrates and a substrate screenin g technique was developed based on this phenomenon. SIRIS depth profil es showed much greater copper in HgCdTe films than in the substrates, indicating that copper is preferentially attracted to HgCdTe over Cd(Z n)Te. SIRIS spatial mapping showed that copper is concentrated in subs trate tellurium inclusions 5-25 times greater than in the surrounding CdZnTe matrix.