Cd. Maxey et al., GROWTH OF FULLY DOPED HG1-XCDXTE HETEROSTRUCTURES USING A NOVEL IODINE DOPING SOURCE TO ACHIEVE IMPROVED DEVICE PERFORMANCE AT ELEVATED-TEMPERATURES, Journal of electronic materials, 25(8), 1996, pp. 1276-1285
Band gap engineered Hg1-xCdxTe (MCT) heterostructures should lead to d
etectors tors with improved electro-optic and radiometric performance
at elevated operating temperatures. Growth of such structures was acco
mplished using metalorganic vapor phase epitaxy (MOVPE). Acceptor dopi
ng with arsenic (As), using phenylarsine (PhAsH(2)), demonstrated 100%
activation and reproducible control over a wide range of concentratio
ns(1 x 10(15) to 3.5 x 10(17) cm(-3)). Although vapor from elemental i
odine showed the suitability of iodine as a donor in MCT, problems aro
se while controlling low donor concentrations. Initial studies using e
thyliodide (EtI) demonstrated that this source could be used successfu
lly to dope MCT, yielding the properties required for stable heterostr
ucture devices, i.e.approximate to 100% activation, no memory problems
and low diffusion coefficient. Cryogenic alkyl cooling or very high d
ilution factors were required to achieve the concentrations needed for
donor doping below approximate to 10(16) cm(-3) due to the high vapor
pressure of the alkyl. A study of an alternative organic iodide sourc
e, 2-methylpropyliodide (2 MePrI), which has a much lower vapor pressu
re, improved control of low donor concentrations. 2 MePrI demonstrated
the same donor source suitability as EtI and was used to control iodi
ne concentrations from approximate to 1 x 10(15) to 5 x 10(17) cm(-3).
The iodine from both sources only incorporated during the CdTe cycles
of the interdiffused multilayer process (IMP) in a similar manner to
both elemental iodine and As from PhAsH(2). High resolution secondary
ion mass spectroscopy analysis showed that IMP scale modulations can s
till be identified after growth. The magnitude of these oscillations i
s consistent with a diffusion coefficient of approximate to 7 x 10(-16
) cm(2)s(-1) for iodine in MCT at 365 degrees C. Extrinsically doped d
evice heterostructures, grown using 2 MePrI, have been intended to ope
rate at elevated temperatures either for long wavelength (8-12 mu m) e
quilibrium operation at 145K or nonequilibrium operation at 190 and 29
5K in both the 3-5 mu m and 8-12 mu m wavelength ranges. Characterizat
ion of such device structures will be discussed. Linear arrays of mesa
devices have been fabricated in these layers. Medium wave nonequilibr
ium device structures have demonstrated high quantum efficiencies and
R(0)A = 37 Omega cm(2) for lambda(co) = 4.9 mu m at 190K.