SIMULTANEOUS IMAGING OF SI(111) 7X7 WITH ATOMIC-RESOLUTION IN SCANNING-TUNNELING-MICROSCOPY, ATOMIC-FORCE MICROSCOPY, AND ATOMIC-FORCE MICROSCOPY NONCONTACT MODE

Authors
GUTHNER P
Citation
P. Guthner, SIMULTANEOUS IMAGING OF SI(111) 7X7 WITH ATOMIC-RESOLUTION IN SCANNING-TUNNELING-MICROSCOPY, ATOMIC-FORCE MICROSCOPY, AND ATOMIC-FORCE MICROSCOPY NONCONTACT MODE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2428-2431
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
14
Issue
4
Year of publication
1996
Pages
2428 - 2431
Database
ISI
SICI code
1071-1023(1996)14:4<2428:SIOS7W>2.0.ZU;2-9
Abstract
The reconstructed Si (111) 7x7 surface was imaged in several operation modes of the combined ultrahigh vacuum atomic force microscope/scanni ng tunnel microscope. By imaging single atom defects on the sample sur face a clear proof of the atomic resolution in noncontact mode of the force microscope was possible. By simultaneous measurements of several interaction parameters and by the investigation of force-distance cur ves, it was possible to explain the origin of the interaction. (C) 199 6 American Vacuum Society.