MOLECULAR-BEAM EPITAXY-GROWN ZNSE STUDIED BY REFLECTANCE ANISOTROPY SPECTROSCOPY AND REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION

Citation
Jt. Zettler et al., MOLECULAR-BEAM EPITAXY-GROWN ZNSE STUDIED BY REFLECTANCE ANISOTROPY SPECTROSCOPY AND REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2757-2760
Citations number
30
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
14
Issue
4
Year of publication
1996
Pages
2757 - 2760
Database
ISI
SICI code
1071-1023(1996)14:4<2757:MEZSBR>2.0.ZU;2-G
Abstract
In this work we report on the in situ investigation of MBE grown ZnSe surfaces performed simultaneously by reflectance anisotropy spectrosco py (RAS) and reflection high-energy electron diffraction (RHEED). Reco nstructions and anisotropic reflectance of the ZnSe(001) surface are s tudied in the temperature range from 50 degrees C to 380 degrees C. Wi th increasing temperature the ZnSe surface evolves from a Se-rich c(2x 2)(Se) via a Se-rich (2x1) to a Zn-rich c(2x2)(Zn) surface reconstruct ion with the transition temperatures depending on whether the surface is Se stabilized or not. Each surface reconstruction as verified by RH EED is accompanied by a characteristic RAS spectrum. Time resolved mea surements of the RAS signal at fixed photon energies allowed to determ ine the activation energy (0.7 eV) for the Se desorption from the (2x1 ) reconstructed ZnSe(001) surface. (C) 1996 American Vacuum Society.