T. Yasuda et al., SITU CHARACTERIZATION OF ZNSE GAAS(100) INTERFACES BY REFLECTANCE DIFFERENCE SPECTROSCOPY/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 3052-3057
We discuss the structure and formation mechanism of ZnSe/GaAs(100) int
erfaces as probed by reflectance difference spectroscopy (RDS). First
we describe a simple analytic procedure that separates the surface and
interface contributions in the RD spectra obtained for a heterostruct
ure. The procedure opens up the new possibilities of RDS as an in situ
interface probe. We have applied this technique to characterize the Z
nSe/GaAs interfaces prepared on various GaAs(100) surfaces. The interf
ace-anisotropy spectra thus obtained and the cross-sectional transmiss
ion electron microscopy, show clearly that the chemical composition of
the interfacial layer can be changed by controlling the reconstructio
n and the pregrowth Zn and Se treatments of the initial GaAs surface.
(C) 1996 American Vacuum Society.