ANISOTROPIC OPTICAL REFLECTION BY STEPPED SURFACES

Authors
DEBOEIJ PL WIJERS CMJ ZOETHOUT E
Citation
Pl. Deboeij et al., ANISOTROPIC OPTICAL REFLECTION BY STEPPED SURFACES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 3080-3088
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
14
Issue
4
Year of publication
1996
Pages
3080 - 3088
Database
ISI
SICI code
1071-1023(1996)14:4<3080:AORBSS>2.0.ZU;2-2
Abstract
Discrete dipole calculations of the double cell type have been used to study the anisotropic reflection at normal incidence of stepped <Si(0 0(1)over bar )> 2x1-type surfaces. Only D-B-type steps have been used. The maximum of the anisotropy turns out to be in a direction rotated with respect to the principal axes, and the anisotropy itself depends strongly on terrace width. Further the crossed polarizer configuration is interesting for experimental work since it has no offset. (C) 1996 American Vacuum Society.