E. Kneedler et al., EPITAXIAL-GROWTH, STRUCTURE, AND COMPOSITION OF FE FILMS ON GAAS(001)-2X4, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 3193-3198
The structure and composition of Fe films grown on As-terminated GaAs(
001)-2x4 surfaces at 175 degrees C has been studied in situ with scann
ing tunneling microscopy (STM), photoelectron diffraction (FED), and x
-ray photoelectron spectroscopy (XPS). The GaAs surfaces were prepared
by molecular beam epitaxy (MBE) and exhibited large atomically well-o
rdered terraces. We find that the 2x4 reconstruction has a significant
impact on the Fe nucleation and growth, with initial nucleation occur
ring at As-dimer sites. STM reveals that the first half-monolayer of F
e forms small two-dimensional islands along the As-dimer rows before g
rowing onto the adjacent Ga-rich rows, with no evidence of substrate d
isruption. FED indicates that the growth is predominantly layer by lay
er, with the growth front for the nth deposited layer limited to the (
n+1)th layer. XPS spectra show that the Fe films include a concentrati
on gradient of Ga and As out-diffused from the interface, with some of
the As segregating to the Fe surface, similar to previous results obt
ained for growth on non-MBE prepared GaAs surfaces. Possible mechanism
s for the film growth and the origins of the intermixing are discussed
. (C) 1996 American Vacuum Society.