We introduce a method to quantify the extend to which HRTEM imaging wi
th high-energy electrons damages the specimen. The method rests on dig
ital comparison of images recorded at increasing beam exposure times b
ut otherwise constant conditions. Difference images we calculate from
these original images reveal whether damaging preferentially occurs at
extended defects like internal interfaces. Further image analysis all
ows us to estimate how long one may image the specimen before irradiat
ion damage interferes with solving the specimen structure at a given l
evel of confidence. We demonstrate the usefulness of the method by app
lying it to HRTEM images of two types of interfaces. the interface bet
ween Cu and sapphire, and the Sigma 3 (111) twin boundary in NiAl, bot
h imaged in a high voltage high resolution microscope operating with 1
250 keV electrons. From our results we conclude that under these condi
tions HRTEM images of the two interfaces should be recorded during the
first 10 min of observation in order to avoid irradiation-related art
ifacts in structure analysis.