DETERMINATION OF THE HEIGHT OF A MICROSTRUCTURE SAMPLE BY A SEM WITH A CONVENTIONAL AND A DIGITAL PHOTOGRAMMETRIC

We describe two methods for the determination of the height of a micro structure sample using a scanning electron microscope, Measurements an d model calculations concerning the distance between relevant edges ha ve been carried out as a function of tilt angle for a special microsam ple. Representing practical cases of microstructure parameters the cal culations show the range of applicability of this traditional method. The application of digital photogrammetry for the determination of mic rostructure dimensions is a new method to determine the height and gen erally. the topography of microstructure objects. For a precise photog rammetric measurement we need some well-defined measuring points. Thei r image coordinates have to be determined. A nanomarker technique has been used for the creation of such measuring points. The results of th e height determination in the conventional way agree approximately wit h that of the digital photogrammetric method. We achieved a precision of the height determination below 100 nm for both methods. Further imp rovements have to be implemented in order to automate the photogrammet ric analysis procedure.