INTEGRATED RF AND MICROWAVE COMPONENTS IN BICMOS TECHNOLOGY

This paper presents and discusses an approach to exploit conventional BiCMOS technology for monolithic integration of rf & microwave systems . Several components, which are important elements of rf & microwave c ircuit design and which are not available in current BiCMOS, are descr ibed and characterized. The results for integrated spiral inductors in particular show that obvious limitations in comparison to compound se miconductor technology or hybrid configurations can be overcome to a l arge extent by utilizing the structural design options given with VLSI silicon integration technology.