ELECTRON-DIFFRACTION PATTERNS OF FIBROUS AND LAMELLAR TEXTURED POLYCRYSTALLINE THIN-FILMS .2. APPLICATIONS

Citation
L. Tang et al., ELECTRON-DIFFRACTION PATTERNS OF FIBROUS AND LAMELLAR TEXTURED POLYCRYSTALLINE THIN-FILMS .2. APPLICATIONS, Journal of applied crystallography, 29, 1996, pp. 419-426
Citations number
8
Categorie Soggetti
Crystallography
ISSN journal
00218898
Volume
29
Year of publication
1996
Part
4
Pages
419 - 426
Database
ISI
SICI code
0021-8898(1996)29:<419:EPOFAL>2.0.ZU;2-5
Abstract
Electron diffraction patterns of a sputter-deposited polycrystalline M gO thin film on an SiO2 substrate, of a Ta thin film and of CoCrTa/Cr bilayer films on glass substrates are presented and analyzed based on the theory developed in Paper I [Tang & Laughlin (1996). J Appl. Cryst . 29, 411-418]. It is found that the MgO film is [001] textured with a distribution angle of 13 degrees. The Ta film is composed both of ran domly oriented grains and [011] textured grains. The [011] texture axi s distribution angle of the Ta film is determined to be 11 degrees. (< 11(2)over bar 0>)CoCrTa/(001)Cr and (<10(1)over bar 1>)CoCrTa/(011)Cr polycrystalline epitaxy are identified in the CoCrTa/Cr bilayer films. Both the bilayer films have a texture axis distribution angle of 6 de grees.