EFFECT OF ZROCL2 ON THE THERMAL-OXIDATION OF INP

Authors
MITTOVA IY TOMINA EV SOSHNIKOV VV KASHKAROV VM
Citation
Iy. Mittova et al., EFFECT OF ZROCL2 ON THE THERMAL-OXIDATION OF INP, Inorganic materials, 32(9), 1996, pp. 914-916
Citations number
8
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
32
Issue
9
Year of publication
1996
Pages
914 - 916
Database
ISI
SICI code
0020-1685(1996)32:9<914:EOZOTT>2.0.ZU;2-W
Abstract
The mechanism responsible for the thermal oxidation of InP in the pres ence of ZrOCl2 was assessed from kinetic measurements. Ultrasoft x-ray spectroscopy and IR absorption data showed that the oxidized layers c onsist of InPO4, In2O3, P2O5, and unoxidized phosphorus.