Porous silica waveguide blanks were fabricated by the outside vapor de
position process. With increasing substrate diameter or hydrogen flow
rate, both the deposition rate and the SiCl4 conversion efficiency ris
e. The effect of hydrogen flow rate and substrate velocity on the bulk
density and open porosity of blanks is examined. The results obtained
here are of importance to the study of subsequent stages-drying and v
itrification of porous blanks-involved in the fabrication of fiber wav
eguides.