SELECTIVE WET ETCHING OF LATTICE-MATCHED INGAAS INALAS ON INP AND METAMORPHIC INGAAS/INALAS ON GAAS USING SUCCINIC ACID HYDROGEN-PEROXIDE SOLUTION (VOL 14, PG 3400, 1996)/

Authors
FOURRE H DIETTE F CAPPY A
Citation
H. Fourre et al., SELECTIVE WET ETCHING OF LATTICE-MATCHED INGAAS INALAS ON INP AND METAMORPHIC INGAAS/INALAS ON GAAS USING SUCCINIC ACID HYDROGEN-PEROXIDE SOLUTION (VOL 14, PG 3400, 1996)/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3603-3603
Citations number
1
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
14
Issue
6
Year of publication
1996
Pages
3603 - 3603
Database
ISI
SICI code
1071-1023(1996)14:6<3603:SWEOLI>2.0.ZU;2-H