Xr. Jiang et al., COMBINED CALCULATION OF LENS ABERRATIONS, SPACE-CHARGE ABERRATIONS, AND STATISTICAL COULOMB EFFECTS IN CHARGED-PARTICLE OPTICAL-COLUMNS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3747-3752
Optimizing a charged particle optical system utilizing a high brightne
ss source requires the inclusion of the effect of Coulomb interactions
in the evaluations. A new computer program package, named ANALIC, has
bean developed to perform the combined calculation of lens aberration
s, space charge aberrations, and statistical Coulomb effects in a comp
lete instrument. By making use of an analytical slice method, valid fo
r weak/incomplete collisions, to calculate the Coulomb interactions, t
he program combines reasonable accuracy with high speed. Using ANALIC,
an optical system with an arbitrary number of lenses and apertures, a
n arbitrary mode of imaging, and an arbitrary distribution of the beam
energy can be analyzed directly. The functions, features, organizatio
n, and calculation approach of the program are reported. As an example
of the use of the program, a four lens electron probe instrument is a
nalyzed for the demonstration of the combined calculation and optimiza
tion process of a particle optical system. (C) 1996 American Vacuum So
ciety.