ENERGY-DISTRIBUTIONS OF FIELD EMITTED ELECTRONS FROM CARBIDE TIPS ANDTUNGSTEN TIPS WITH DIAMOND-LIKE CARBON COATINGS

Authors
YU ML KIM HS HUSSEY BW CHANG THP MACKIE WA
Citation
Ml. Yu et al., ENERGY-DISTRIBUTIONS OF FIELD EMITTED ELECTRONS FROM CARBIDE TIPS ANDTUNGSTEN TIPS WITH DIAMOND-LIKE CARBON COATINGS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3797-3801
Citations number
23
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
14
Issue
6
Year of publication
1996
Pages
3797 - 3801
Database
ISI
SICI code
1071-1023(1996)14:6<3797:EOFEEF>2.0.ZU;2-V
Abstract
We have measured the energy distributions of electrons held emitted fr om tungsten carbide, HfC[100], and ZrC[100] tips, and tungsten held em itters with diamondlike carbon coatings. Multiple-peaked energy distri butions were observed from instability induced emission sites on the c arbide tips. Energy distributions of electrons field emitted from the diamondlike carbon coated tungsten tips were broader than those from m etal tips. They also showed a shift towards lower energies with increa ses in the emission current. (C) 1996 American Vacuum Society.