COMBINED METHOD OF ELECTRON-BEAM LITHOGRAPHY AND ION-IMPLANTATION TECHNIQUES FOR THE FABRICATION OF HIGH-TEMPERATURE SUPERCONDUCTOR JOSEPHSON-JUNCTIONS
J. Hollkott et al., COMBINED METHOD OF ELECTRON-BEAM LITHOGRAPHY AND ION-IMPLANTATION TECHNIQUES FOR THE FABRICATION OF HIGH-TEMPERATURE SUPERCONDUCTOR JOSEPHSON-JUNCTIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4100-4104
Established semiconductor process technologies are demonstrated to be
suitable for the fabrication of high temperature superconductor Joseph
son junctions. Single YBa2Cu3O7 bridges have been modified by local ox
ygen ion irradiation through a narrow slit in an implantation mask, wh
ich was formed by electron-beam lithography and reactive ion etching.
The influence of the slit dimension, the mask thickness, and the irrad
iation dose have been investigated systematically. The critical curren
t and the normal resistance of the modified microbridges were found to
be controllable by these parameters achieving a great variety of diff
erent I/V curves, i.e., resistive or superconductor/normal/superconduc
tor (SNS) Josephson junction behavior. Further investigations were per
formed on SNS junctions. Microwave irradiation of the microbridges exh
ibits Shapiro steps in the I/V characteristics. In de superconducting
quantum interference devices a voltage modulation as a function of an
applied magnetic flux is observed. (C) 1996 American Vacuum Society.