MEASURING AND MODELING STRESSES IN AL METALLIZATION

Stresses in passivated and unpassivated Al films with different thickn esses have been measured with x-ray diffraction. The stress strongly d epends on the thickness of a film and is different from conventional e lastic or plastic theory. A novel model based on plastic deformation a nd dislocation theories has been developed to explain it. In the model it is assumed that interaction between Al and the dielectric near the ir interface increases the yield strength of the Al him. Results calcu lated through the model are consistent with experimental results. (C) 1996 American Vacuum Society.