EXTENDED OPERATION OF A WIDE-RANGE, ALL-MAGNETIC BEARING TURBOMOLECULAR PUMP WITHOUT BACKING

Authors
THOMPSON JR WEBER PM HELLMER R
Citation
Jr. Thompson et al., EXTENDED OPERATION OF A WIDE-RANGE, ALL-MAGNETIC BEARING TURBOMOLECULAR PUMP WITHOUT BACKING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(5), 1996, pp. 2965-2967
Citations number
NO
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
14
Issue
5
Year of publication
1996
Pages
2965 - 2967
Database
ISI
SICI code
0734-2101(1996)14:5<2965:EOOAWA>2.0.ZU;2-I