Z. Lilientalweber et al., STRUCTURAL CHARACTERIZATION OF BULK GAN CRYSTALS GROWN UNDER HIGH HYDROSTATIC-PRESSURE, Journal of electronic materials, 25(9), 1996, pp. 1545-1550
This paper describes TEM characterization of bulk GaN crystals grown a
t 1500-1800K in the form of plates from a solution of atomic nitrogen
in liquid gallium under high nitrogen pressure (up to 20 kbars). Their
x-ray rocking curves for these crystals were in the range of 20-30 ar
c-sec. The plate thickness along the c axis was about 100 times smalle
r than the nonpolar growth directions. A substantial difference in mat
erial quality was observed on the opposite sides of the plates normal
to the c direction. On one side the surface was atomically flat, while
on the other side the surface was rough, with pyramidal features up t
o 100 nm high. The polarity of the crystals was determined using conve
rgent-beam electron diffraction. The results showed that, regarding th
e long bond between Ga and N along the c-axis, Ga atoms were found to
be closer to the flat side of the crystal, while N atoms were found to
be closer to the rough side. Near the rough side, within 1/10 to 1/4
of the plate thickness, there was a high density of planar defects (st
acking faults and dislocation loops decorated by Ga/void precipitates)
. A model explaining the defect information is proposed.