PROXIMAL PROBE LITHOGRAPHY AND SURFACE MODIFICATION

The advantage of a low voltage approach to lithography and surface mod ification is that a more spatially localized energy deposition can be achieved than with a focused high energy charged particle beam. Proxim al probes, such as the scanning tunnelling microscope or atomic force microscope with a conductive tip, are convenient ways to realize this approach. We summarize here research performed over the past few years at the Naval Research Laboratory directed towards materials studies a nd lithographic fabrication of structures and devices using proximal p robes.