SCANNING PROBE MICROSCOPY FOR NANOMETER INSPECTIONS AND INDUSTRIAL APPLICATIONS

Authors
GUTMANNSBAUER W HUG HJ MEYER E
Citation
W. Gutmannsbauer et al., SCANNING PROBE MICROSCOPY FOR NANOMETER INSPECTIONS AND INDUSTRIAL APPLICATIONS, Microelectronic engineering, 32(1-4), 1996, pp. 389-409
Citations number
70
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
32
Issue
1-4
Year of publication
1996
Pages
389 - 409
Database
ISI
SICI code
0167-9317(1996)32:1-4<389:SPMFNI>2.0.ZU;2-E