PECULIARITIES OF THE INITIAL-STAGE OF ZN DIFFUSION INTO INP FROM POLYMER SPIN-ON FILMS

Authors
KAMANIN AV MOKINA IA SHMIDT NM
Citation
Av. Kamanin et al., PECULIARITIES OF THE INITIAL-STAGE OF ZN DIFFUSION INTO INP FROM POLYMER SPIN-ON FILMS, Solid-state electronics, 39(10), 1996, pp. 1441-1444
Citations number
20
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid-state electronics → ACNP
ISSN journal
00381101
Volume
39
Issue
10
Year of publication
1996
Pages
1441 - 1444
Database
ISI
SICI code
0038-1101(1996)39:10<1441:POTIOZ>2.0.ZU;2-Z
Abstract
The initial stage of Zn diffusion into InP from polymer spin-on films has been investigated. A high concentration of microdefects and extend ed defects in the near-surface region (depth up to 1 mu m), anomalousl y deep penetration of Zn atoms with a diffusivity nearly independent o f temperature and a low activation degree of diffused Zn have been fou nd. A kick-out mechanism is thought to be dominant at the initial stag e. Copyright (C) 1996 Elsevier Science Ltd