A NEW FAILURE ANALYSIS TECHNIQUE USING THE THERMO-ELECTROMOTIVE FORCEINDUCED BY LASER IRRADIATION

Authors
MASHIKO Y KOYAMA T KOYAMA H
Citation
Y. Mashiko et al., A NEW FAILURE ANALYSIS TECHNIQUE USING THE THERMO-ELECTROMOTIVE FORCEINDUCED BY LASER IRRADIATION, Quality and reliability engineering international, 12(4), 1996, pp. 253-257
Citations number
9
Categorie Soggetti
Engineering
Journal title
Quality and reliability engineering international → ACNP
ISSN journal
07488017
Volume
12
Issue
4
Year of publication
1996
Pages
253 - 257
Database
ISI
SICI code
0748-8017(1996)12:4<253:ANFATU>2.0.ZU;2-P
Abstract
A new failure analysis technique based on the thermo-electromotive for ce induced by laser irradiation has been developed for evaluation of i nterconnects. This technique, which uses a high sensitivity OBIC (opti cal beam induced current) system, realizes the sensitive detection of defects, such as infant and advanced defects in aluminium (Al) interco nnects, with no application of voltage or the removal of overlaid insu lator films. This technique has been demonstrated in the analyses of m any modes of interconnect failure.