The origin of incoherent imaging in STEM has been analysed by investig
ating the effects of the detector geometry and of the thermal vibratio
ns of the atoms on the image formation. The conditions for incoherent
imaging are discussed. In this case the Fourier transforms of the inte
nsities at the exit plane of the object and at the image plane are lin
early related with each other, The corresponding transfer function coi
ncides with the modulation transfer function for incoherent imaging in
TEM. By analysing the properties of the degree of coherence, the reas
ons for the suppression of the interference terms are shown and detect
or arrangements are found which yield largely incoherent images. The v
alidity of the semianalytical results for thin objects are also confir
med numerically for thick objects by means of a modified multislice al
gorithm. With increasing object thickness the phonon scattered electro
ns dominate the image intensity. Detector arrangements were found for
which the elastic part of the image shows contrast reversal. The depen
dence of the Z-contrast on the geometry of the annular detector and on
the atomic number Z is investigated in detail.