Xl. Chen et al., INTERFEROMETRIC LITHOGRAPHY OF SUBMICROMETER SPARSE HOLE ARRAYS FOR FIELD-EMISSION DISPLAY APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(5), 1996, pp. 3339-3349
Interferometric lithography, the use of interactions between coherent
laser beams to define subwavelength patterns, is well adapted to the p
eriodic nature of field-emitter structures. Techniques to fabricate sp
arse (hole diameter to pitch ratio of 1:3 or larger) emitter arrays to
improve reliability and Lifetime are presented. These include: multip
le exposures at two different pitches; integration of interferometric
and optical imaging lithography; and various multiple beam techniques
that both provide a sparse array and result in a two dimensional patte
rn in a single exposure. Moire alignment techniques are demonstrated t
o provide a simple process for aligning multiple levels. Manufacturing
related issues such as process latitude and photoresist profiles and
their suitability for subsequent processing are also discussed. Exposu
re-dose process control using latent image monitoring is demonstrated.
(C) 1996 American Vacuum Society.