The turn-on speed of nMOS transistors (nMOST) is of paramount importan
ce for robust Charged Device Model (CDM) protection circuitry. In this
paper the nMOST turn-on time has been measured for the first time in
the sub-halve nanosecond range with a commercial e-beam tester. The me
thod may be used to improve CDM-ESD hardness by investigating the CDM
pulse responses within circuit. Furthermore it is shown that the CDM r
esults of various protection layouts can be simulated with a SPICE mod
el. Copyright (C) 1996 Elsevier Science Ltd