RELIABILITY OF A FOCUSED ION-BEAM REPAIR ON DIGITAL CMOS CIRCUITS

The usefulness of FIB technology for device modification is commonly r ecognized in the industry. Yet, very little is known concerning the re liability of these circuit changes. This paper presents the reliabilit y assessment of a ''standard'' FIB repair on digital CMOS circuits. Th e overall conclusion is positive : the lifetime of a ''standard'' FIB repair is found to be more than a few months, which is largely suffici ent for prototyping. Copyright (C) 1996 Elsevier Science Ltd