TECHNIQUES FOR MOLECULAR-BEAM EPITAXY OF MULTIPLE-WAVELENGTH VERTICAL-CAVITY LASER ARRAYS

New techniques are proposed for engineering the lateral growth rate pr ofile in molecular beam epitaxy for fabrication of arrays of vertical- cavity lasers operating at different wavelengths. A previous study of the use of flux masks to achieve uniform profiles is extended to the c ase of intentionally nonuniform profiles along the radial direction. I t is further suggested that substrate rotation at variable angular vel ocities can produce intentionally nonuniform profiles in the polar dir ection.