S. Tanaka et al., TRANSMISSION ELECTRON-MICROSCOPY STUDY OF INGAASP INGAP THIN-LAYER STRUCTURE GROWN BY LIQUID-PHASE EPITAXY/, Journal of crystal growth, 166(1-4), 1996, pp. 334-338
Cross-sectional transmission electron microscopy observations were car
ried out for InGaAsP/InGaP thin layers grown on (111)A GaAs by liquid
phase epitaxy. Fine-scale periodic contrast modulation along the surfa
ce was observed in epilayers irrespective of the composition. The peri
od is 20-30 nm. The heterointerfaces were found to be abrupt down to t
he atomic scale(i.e., similar to 1.2 nm).