T. Kawaguchi et al., GROWTH-TEMPERATURE DEPENDENCE OF THE LI NB RATIO IN LPE-GROWN LINBO3 FILMS ESTIMATED BY 2ND-HARMONIC GENERATION/, Journal of crystal growth, 166(1-4), 1996, pp. 493-496
The relationship between the Li/Nb ratio of Liquid-phase epitaxial (LP
E) grown LiNbO3 films and the growth temperature is investigated by me
ans of second-harmonic generation measurements. Uniform 3-inch-wafer-s
ize epitaxial films, which are available in conventional device fabric
ation processes, were successfully grown.