ELECTRON TRANSMISSION COEFFICIENT FOR OBLIQUE ANGLE OF INCIDENCE

Citation
M. Andrae et al., ELECTRON TRANSMISSION COEFFICIENT FOR OBLIQUE ANGLE OF INCIDENCE, Mikrochimica acta, 1996, pp. 217-224
Citations number
11
Categorie Soggetti
Chemistry Analytical
Journal title
ISSN journal
00263672
Year of publication
1996
Supplement
13
Pages
217 - 224
Database
ISI
SICI code
0026-3672(1996):<217:ETCFOA>2.0.ZU;2-9
Abstract
Starting from a scattering model the transmission coefficient of elect rons for oblique angle of incidence is derived. The decrease of the tr ansmitted fraction is described by the backscattering of electrons and the energy loss caused by the decreasing mean free path. The angular- and energy-distribution of electrons is replaced by the most probable angle and mean energy. A comparison with other models and measurement s valid for normal incidence is performed. The altered transmission ch aracteristics by tilting the sample are verified by comparison with re sults from Monte Carlo simulations and results from Neubert and Rogasc hewski, which are based on measurements. An analytical expression for the transmission law is obtained.