DEPTH DISTRIBUTION FUNCTION FOR OBLIQUE ANGLE OF INCIDENCE

Based on the multiple-reflection model first suggested by V. Lantto a new description of electrons penetrating with an oblique angle of inci dence into the sample is reported, In contrast to most of the authors, who are trying to adapt models for normal incidence to the experiment al results for tilted samples, our model describes the altered shape o f the depth distribution function as a consequence of changed physical quantities due to different geometry. These quantities used for the m ulti-reflection model are: angular- and energy-distributions of backsc attered and transmitted electrons, the backscattering- and the transmi ssion-coefficient. The theoretically derived depth distribution functi ons are compared with results from Monte Carlo simulations.