The present article describes a Monte Carlo method for routine quantit
ative microanalyses of bulk and stratified samples. The model is based
only on elemental processes without experimental adjustments. Our app
roach is tested on data sets of bulk borides and carbides as well as o
n prepared layers of Au on Pt and Au on Si, where k-ratios were measur
ed. Results point out that the proposed model is able to give results
comparable to those obtained by empirical or semi-empirical approaches
.