CALCULATION OF BREMSSTRAHLUNG SPECTRA FOR MULTILAYER SAMPLES

Investigations and new developments of a simple multiple electron scat tering model by August are the basis for further calculations of chara cteristic and continuous depth distribution functions. The validity of the predicted depth distributions has been demonstrated by comparison s with other models. Therefore, application of the simple electron sca ttering model in correction programs for the determination of elementa l concentrations and film thicknesses is justified. Within the scope o f these correction calculations, accurate knowledge of the excited bre amsstrahlung spectrum is essential for quantitative analysis, especial ly in the field of EDS and peak-to-background measurements. Using the description of the continuous depth distribution, a calculation method for breamsstrahlung spectra applicable to any bulk or multilayer samp le is presented.