MONTE-CARLO SIMULATION PROGRAM WITH A FREE CONFIGURATION OF SPECIMEN AND DETECTOR GEOMETRIES

A FORTRAN 77 program package has been developed for the Monte Carlo si mulation of electron trajectories and of secondary electrons (SE), bac kscattered electrons (BSE) and X-ray linescans for scanning electron m icroscopy and microanalysis. A data base contains the relativistic ela stic Mott cross-sections of all elements, the X-ray absorption coeffic ients, and the most relevant ionisation and characteristic X-ray energ ies. Five different compounds and their specimen geometry or a structu re of five multilayers can be configurated by a simple graphic program and the specimen structure is stored in a 350 x 600 matrix. Plots of electron trajectories at different x-positions give an overview of the relation between the specimen geometry and the electron diffusion. Fo r the calculation of linescans, four different BSE detector configurat ions, with varying take-off directions and range of azimuth angles, co nsisting of scintillator, semiconductor, BSE/SE converter or channel p late detectors, and for scanning transmission electron microscopy (STE M) conditions can be configurated and calculated simultaneously. Furth er options are the electron energy, angular and spatial distributions, depth functions of ionization and X-ray generation with and without a n absorption correction.