ELECTRON-PROBE X-RAY-MICROANALYSIS OF COATINGS

Monte-Carlo simulations were applied to electron probe X-ray microanal ysis of thin coatings on a bulk material. The X-ray signal from the fi lm and its lateral extent as a function of film thickness, primary bea m energy and angle of incidence were calculated. All contributions to the measured total X-ray signal were taken into account. These are: a) The signal induced by the primary electron beam. b) The signal induce d by backscattering, considered both within the film and the substrate . c) The signal induced by characteristic and continuous X-rays, creat ed within the substrate by incident and backscattered electrons, which ionise the atoms of the film in their way out of it.