The electron induced oxidation and reduction processes have been studi
ed by Auger electron spectroscopy (AES) and scanning Auger electron mi
croscopy (SAM). The latter experiments enabled us to confirm an equili
brium reaction for the oxidation and reduction depending on the oxygen
pressure and the dose of incident electrons. We found an intensified
oxidation by exposure to X-rays too. Therefore, we are interpreting th
e oxidation and reduction process as Auger electron induced desorption
.