DIFFRACTION EFFECTS IN ELECTRON SPECTROSCOPIC IMAGING

Authors
SCHENNER M NELHIEBEL M SCHATTSCHNEIDER P
Citation
M. Schenner et al., DIFFRACTION EFFECTS IN ELECTRON SPECTROSCOPIC IMAGING, Ultramicroscopy, 65(1-2), 1996, pp. 95-99
Citations number
14
Categorie Soggetti
Microscopy
Journal title
Ultramicroscopy → ACNP
ISSN journal
03043991
Volume
65
Issue
1-2
Year of publication
1996
Pages
95 - 99
Database
ISI
SICI code
0304-3991(1996)65:1-2<95:DEIESI>2.0.ZU;2-7
Abstract
We observed energy-filtered extinction contours in silicon and copper crystals using an imaging-filter system. The observed contrasts are di scussed and compared to a theory describing diffraction effects in ine lastic scattering. The experimental results are evaluated for three ma pping methods widely used in electron spectroscopic imaging, We show t hat quantification errors caused by diffraction effects range from 10% up to a factor of three.