SILICON PHOTODIODE-WAVE-GUIDE COUPLING - 2-DIMENSIONAL MODELING, SOFTWARE SIMULATION AND EXPERIMENTS

In the present paper a system composed of a waveguide coupled by leaky waves with a photodiode on the same silicon chip is studied. Maxwell' s equations for this system have been solved, with light attenuation a nd propagation constants being calculated. The light attenuation is de termined by the silicon and waveguide parameters. A two-dimensional an alysis of current generation in the photodiode has been performed. The two directions considered are the direction of the incoming lightwave (which is parallel to the photodiode junction plane and coupling surf ace) and the direction normal to the junction plane. Based on this ana lysis, a system software simulator has been developed. The simulator i s used to study the influence of technological parameters on the photo current and to design a test structure. In order to measure the test s tructures a special computer-driven opto-mechanical system has been de signed and realized. Copyright (C) 1996 Elsevier Science Ltd