S. Miyaji et al., ASHING RESIDUES ON TIN ANTIREFLECTIVE COATING LAYERS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(6), 1996, pp. 3082-3086
Citations number
12
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Residues appearing on the surface of the TIN antireflective coating (A
RC) layer after a resist ashing process were investigated by transmiss
ion electron microscope and field emission Auger electron spectroscopy
. These residues tend to appear linearly in the center of Al lines cov
ered with the TiN ARC layer, and are generally called the ''backbone.'
' We found that a triangular product mainly composed of Al atoms appea
rs in the center of the resist surface in the final stage of the ashin
g process and that a thin layer, about 10 nm thick, including Ti atoms
, is formed to cover the triangular product and the resist surface. Du
e to the small solubility of the thin layer including Ti atoms to the
alkaline stripper, the triangular product under the thin layer remains
as a backbone residue. We demonstrate that the formation of the backb
one depends on the distribution of Al and Ti atoms in the sidewall pol
ymer. (C) 1996 American Vacuum Society.