DIELECTRIC-PROPERTIES OF ZR, ZRN, ZR3N4, AND ZRO2 DETERMINED BY QUANTITATIVE-ANALYSIS OF ELECTRON-ENERGY-LOSS SPECTRA

Authors
PRIETO P YUBERO F ELIZALDE E SANZ JM
Citation
P. Prieto et al., DIELECTRIC-PROPERTIES OF ZR, ZRN, ZR3N4, AND ZRO2 DETERMINED BY QUANTITATIVE-ANALYSIS OF ELECTRON-ENERGY-LOSS SPECTRA, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(6), 1996, pp. 3181-3188
Citations number
40
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
14
Issue
6
Year of publication
1996
Pages
3181 - 3188
Database
ISI
SICI code
0734-2101(1996)14:6<3181:DOZZZA>2.0.ZU;2-4
Abstract
The dielectric properties of Zr, ZrN, Zr3N4, and ZrO2 in the energy ra nge from 1 to 80 eV were determined by quantitative analysis of electr on energy loss spectroscopy in the reflection mode (REELS) using a rec ently proposed model. Collective excitations and electronic transition s are well characterized in the REELS spectra after analysis of the re spective energy loss function, real and imaginary parts of the dielect ric constant, and the optical joint density of states for the four com pounds studied here. (C) 1996 American Vacuum Society.