SCHIFF-BASE PRECURSOR COMPOUNDS FOR THE CHEMICAL BEAM EPITAXY OF OXIDE THIN-FILMS .1. DEPOSITION OF CUO ON MGO[001] USING COPPER(II) BIS(BENZOYLACETONE)-ETHYLENDIIMINE
E. Fritsch et al., SCHIFF-BASE PRECURSOR COMPOUNDS FOR THE CHEMICAL BEAM EPITAXY OF OXIDE THIN-FILMS .1. DEPOSITION OF CUO ON MGO[001] USING COPPER(II) BIS(BENZOYLACETONE)-ETHYLENDIIMINE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(6), 1996, pp. 3208-3213
Citations number
25
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
A new precursor compound for the deposition of copper oxide thin films
under molecular beam conditio us, copper bis(benzoylacetone)-ethylene
diimine, has been characterized by thermal analysis and in situ mass s
pectrometry. Its stability and decomposition behavior are reported as
well as its use for the deposition of epitaxial cooper oxide thin film
s on MgO. (C) 1996 American Vacuum Society.