J. Hanssmann et O. Meyer, LATTICE LOCATION OF BISMUTH IMPLANTED INTO BERYLLIUM SINGLE-CRYSTALS, Materials chemistry and physics, 46(2-3), 1996, pp. 118-122
Bi ions have been implanted into [11 (2) over bar 0] Be single crystal
s at T = 5.5, 77 and 293 K using doses between 1 X 10(14) atoms/cm(2)
and 1.3 x 10(15) atoms/cm(2) and an ion energy of 300 keV. In situ Rut
herford backscattering (RES) and channeling with 1.5 MeV He ions was u
sed to determine the lattice location of the implanted species. For lo
w dose implantation at 293 K we observed occupation of octahedral inte
rstitial sites. With increasing dose the octahedral fraction decreased
and a random distribution of Bi atoms was observed. By postimplantati
on of Mn, Si shifted back to octahedral sites, while Mn was totally su
bstitutional. In all cases a depth dependence of the octahedral fracti
on was observed being larger in near surface regions. Implantation of
Bi at 5.5 K resulted a substitutional fraction of f(s) = 0.2, together
with a random fraction. No change was observed after warming up to 77
K; however upon warming up to 293 K, Bi shifted to octahedral sites.
Implantation of Bi at 77 K resulted in f(s) values similar to those fo
r 5.5 K implantation, The shift of Bi atoms from random to octahedral
sites during postimplantation and annealing and also the depth depende
nce of the octahedral fraction are attributed to the interaction of Bi
atoms with vacancies (V) forming BiVx complexes and especially BiV6 f
or Bi on octahedral sites.