NANOFABRICATION ON ELECTRON-BEAM RESIST USING SCANNING-TUNNELING-MICROSCOPY

Authors
ARCHER A HETRICK JM NAYFEH MH ADESIDA I
Citation
A. Archer et al., NANOFABRICATION ON ELECTRON-BEAM RESIST USING SCANNING-TUNNELING-MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3166-3170
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3166 - 3170
Database
ISI
SICI code
1071-1023(1994)12:6<3166:NOERUS>2.0.ZU;2-R