MICROMECHANICAL STRUCTURES FOR ELECTRON-BEAM AND ION-BEAM IRRADIATIONPHENOMENA

Authors
OGO I MACDONALD NC
Citation
I. Ogo et Nc. Macdonald, MICROMECHANICAL STRUCTURES FOR ELECTRON-BEAM AND ION-BEAM IRRADIATIONPHENOMENA, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3285-3288
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3285 - 3288
Database
ISI
SICI code
1071-1023(1994)12:6<3285:MSFEAI>2.0.ZU;2-O