INVESTIGATION OF MODULATED RADIO-FREQUENCY PLASMA-ETCHING OF GAAS USING LANGMUIR PROBES

Authors
LAW VJ BRAITHWAITE NS INGRAM SG CLARY DC JONES GAC
Citation
Vj. Law et al., INVESTIGATION OF MODULATED RADIO-FREQUENCY PLASMA-ETCHING OF GAAS USING LANGMUIR PROBES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3337-3341
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3337 - 3341
Database
ISI
SICI code
1071-1023(1994)12:6<3337:IOMRPO>2.0.ZU;2-A