EFFECTS OF CATION DIFFUSION ON THE MONOLAYER CONTROL OF CHEMICAL BEAMETCHING

Authors
CHIU TH WILLIAMS MD TSANG WT KAPRE RM
Citation
Th. Chiu et al., EFFECTS OF CATION DIFFUSION ON THE MONOLAYER CONTROL OF CHEMICAL BEAMETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3369-3373
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3369 - 3373
Database
ISI
SICI code
1071-1023(1994)12:6<3369:EOCDOT>2.0.ZU;2-4