HIGH-ASPECT-RATIO ALIGNED MULTILAYER MICROSTRUCTURE FABRICATION

Authors
LEE KY RISHTON SA CHANG THP
Citation
Ky. Lee et al., HIGH-ASPECT-RATIO ALIGNED MULTILAYER MICROSTRUCTURE FABRICATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3425-3430
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3425 - 3430
Database
ISI
SICI code
1071-1023(1994)12:6<3425:HAMMF>2.0.ZU;2-D