ELECTRON-BEAM LITHOGRAPHY OF CURVED STRUCTURES WITH AN ENHANCED VECTOR-SCAN PATTERN GENERATOR SUPPORTING CONIC-BASED PRIMITIVES

Authors
VASEY F PRONGUE D ROTHUIZEN H VETTIGER P
Citation
F. Vasey et al., ELECTRON-BEAM LITHOGRAPHY OF CURVED STRUCTURES WITH AN ENHANCED VECTOR-SCAN PATTERN GENERATOR SUPPORTING CONIC-BASED PRIMITIVES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3460-3464
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3460 - 3464
Database
ISI
SICI code
1071-1023(1994)12:6<3460:ELOCSW>2.0.ZU;2-#